MODELING AND HARDWARE FOR THE IMPLEMENTATION OF AN ELECTRONIC CONTROL UNIT FOR A MAGNETRON Kursakov L. A., Agoev A. Z., Kunashev Z. A., Melyazhev A. A., Gaev D. S.

 

MODELING AND HARDWARE FOR THE IMPLEMENTATION OF AN ELECTRONIC CONTROL UNIT FOR A MAGNETRON Kursakov L. A., Agoev A. Z., Kunashev Z. A., Melyazhev A. A., Gaev D. S. Abstract. The paper presents the results of the development of a magnetron power supply unit for ion sputtering installations of non-magnetic materials, which provides smooth and precise control of magne-tron power at direct current. The operation of the electronic unit was simu-lated in the Multisim software environment. The hardware implementation of the electronic power unit for controlling and powering the magnetron is made on a modern electronic component base. The results of experimental tests of the electronic unit are presented.

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