AUTOR DO BLOG ENG.ARMANDO CAVERO MIRANDA SÃO PAULO BRASIL

"OBRIGADO DEUS PELA VIDA,PELA MINHA FAMILIA,PELO TRABALHO,PELO PÃO DE CADA DIA,PROTEGENOS DO MAL"

"OBRIGADO DEUS PELA VIDA,PELA MINHA FAMILIA,PELO TRABALHO,PELO PÃO DE CADA DIA,PROTEGENOS  DO MAL"

“SE SEUS PROJETOS FOREM PARA UM ANO,SEMEIE O GRÂO.SE FOREM PARA DEZ ANOS,PLANTE UMA ÁRVORE.SE FOREM PARA CEM ANOS,EDUQUE O POVO.”

“Sixty years ago I knew everything; now I know nothing; education is a progressive discovery of our own ignorance. Will Durant”

https://picasion.com/
https://picasion.com/

quarta-feira, 27 de dezembro de 2023

Development of Magnetic Models to Assess Transformers’ Susceptibility to Geomagnetic Disturbances A thesis submitted to The University of Manchester for the degree of Doctor of Philosophy in the Faculty of Science and Engineering


 Development of Magnetic Models to Assess Transformers’ Susceptibility to Geomagnetic Disturbances A thesis submitted to The University of Manchester for the degree of Doctor of Philosophy in the Faculty of Science and Engineering 2018
 Yufan Ni 
School of Electrical and Electronic Engineering

 Abstract 
During the peak years of solar activity, the magnetic field held by the solar wind has an impact on the Earth’s magnetic field and induce an electric field on the Earth’s surface. The Geomagnetically Induced Current (GIC) is generated between two neutral points of transformers. The GIC can do severe harm to a power system, including to its transformers. The worst GIC event caused a power system blackout for several hours in Quebec in 1989. The research aims to build a representative model of core saturation and carry out simulation studies to understand the performance of transformer cores in the high flux density region. This in turn helps to identify the design features that need to be taken into account when assessing the capability of a transformer to withstand over-excitation. ATP is a kind of user-maintained software so it allows self-developed code to be added into the software package. The results simulated by the existing ATP models are inaccurate compared to the measured results. In addition, the existing models cannot provide flux distribution results, so it is difficult to understand the process of how the core is pushed into the deep saturation region by DC offset. A new model is developed to include the equivalent electric and magnetic circuit representations, taking flux leakage, in particular, into consideration. The flux leakage paths are composed of the oil gaps and tank in series. This model is validated by the consistency shown between the measured and simulated HV winding currents of a 5-limb transformer. The peaks of magnetising currents are identified with the peaks of magnetic flux which saturate the core. The model can identify the design features, such as the core structure, dimension of flux leakage paths and winding impedance that need to be taken into account when assessing the capability of a transformer to withstand over-excitation. A 3-limb model and a 5-limb core model are built to assess the susceptibility to GIC for different core types in high flux density region. The delta winding plays a role in holding the 3rd harmonics and unbalanced current generated by core saturation, and in delaying the core saturation. Lastly, Transformers are simulated under realistic GIC waveforms, for situations with and without load. The new model is expected to be coded into ATP to conduct a GIC study for a power system.



terça-feira, 26 de dezembro de 2023

Contribution to the DC-AC conversion in photovoltaic systems :Module oriented converters Oswaldo Lopez Santos-THESE En vue de l'obtention du DOCTORAT DE L’UNIVERSITÉ DE TOULOUSE


 Abstract
These last years, a growing interest in power electronic systems has been motivated by the emergence of distributed renewable energy resources and their interconnection with the grid. In this context, the need of low power topologies fed by a few photovoltaic modules avoiding the use of transformers opens the study of special converters and the associated control strategies ensuring stability, reliability and high efficiency. A resulted generic device known in the commercial and scientific literature as “microinverter” or “module integrated converter” performs a plug and play product together with the PV module called an “AC module”. This work is devoted to the study of a transformer-less single-phase double-stage grid-connected microinverter. The proposed topology has a non-isolated high-gain boost type DC-DC converter and a non-isolated buck type DC-AC converter connected in cascade through a DC bus. The DC-DC converter permanently extracts the maximum power of the PV module ensuring at the same time a good performance coping with power changes introduced by the change in the environmental conditions. The DC-AC stage injects the power extracted by the DC-DC stage into the grid ensuring a high level of power quality. The research efforts focus on the involved control functions based on the sliding mode control theory, which leads to a simple implementation with a comprehensive theoretical description validated through simulation and experimental results. After giving the state-of-the-art in the first chapter, the manuscript is divided into four chapters, which are dedicated to the Maximum Power Point Tracking (MPPT), the DC-DC stage and its control, the DC-AC stage and its control and the complete microinverter. A new Extremum Seeking Control (ESC) MPPT algorithm is proposed. The single-switch quadratic boost converter is studied operating as a Loss-Free-Resistor (LFR) obtaining a high DC output voltage level with a safe operation. The full-bridge converter is controlled as a Power Source Inverter (PSI) using a simple sliding-mode based tracking law, regulating the voltage of the DC bus and then ensuring a high power quality level in the grid connection. Finally, the three building blocks are merged to obtain a sliding mode controlled microinverter constituting the main result and contribution of the work.


segunda-feira, 25 de dezembro de 2023

Parfenov K.V. - Quantum theory. Part 2. Lectures - 1. Combining quantum theory and relativism-Парфенов К.В. - Квантовая теория.Часть 2.Лекции - 1. Объединение квантовой теории и релятивизма


 

How did the USSR miss stealth technology? Part 1 P.Yu. Ufimtsev and the edge wave method-Como a URSS perdeu a tecnologia furtiva? Parte 1 P.Yu. Ufimtsev e o método da onda de borda



The discovery that actually enabled the development of the Lockheed F-117, the first truly stealthy aircraft, was achieved by the Russian physicist Pyotr Ufimtsev, who in 1962 published a paper on a new method (not the first) for estimating edge diffraction, which became known as the Physical Theory of Diffraction. Ufimtsev postulated that Maxwell's equations would make it possible to calculate the behavior of radar waves relayed from a reflective object. The radar return would depend in part on the shape of the object.

Probably one of the main achievements of the Soviet era is the enormous development of technical and basic sciences. It is worth saying that during the period 1950–1970, 7 people became Nobel Prize laureates in physics, 1 in chemistry (from 1980 to 2019, only 3, and that’s a stretch). The number of scientific workers in the USSR in 1975 was a quarter (a quarter, Karl) of the scientific workers of the whole world. 

The era of 1950-1970 was marked by brilliant achievements in astronautics, nuclear energy and the aviation industry. It’s the last one I’d like to talk about. Ufimtsev and the edge wave method All this enormous scientific potential often transformed from quantity to quality. So, in 1962, a young scientist, 

P.Ya. Ufimtsev published a monograph “The method of edge waves in the physical theory of diffraction.”



Being familiar with it from a course in electrodynamics, I can say that the reading is quite difficult, but entertaining, and non-specialists in the field of antennas and microwave devices will understand little in it. This book consists of solving diffraction problems on simple bodies and mainly consists of deriving formulas. Here are some, for example:




Example of output of one of the formulas 

 With the help of such calculations, solutions to a number of diffraction problems for a wedge and disk were obtained, and non-uniform parts of the current were found for these bodies. The theory of physical optics existing at that time did not take into account the uneven part of the current, which was concentrated near the kink. To put it more roughly, it turned out to be possible to more accurately describe the further behavior of electromagnetic waves when falling on surfaces with kinks and sharp edges. More accurately predict the structure of scattered waves. It would seem, what does aviation have to do with it?

Stealth aircraft concept Since the mid-20th century, almost all countries have used radar stations to monitor air or water space.



Let's focus only on air. The detection range of an object: an airplane, a helicopter, a seagull or a crow is largely determined by the characteristics of the radar, but there is one characteristic that is inherent to the object - the effective scattering area (ESR). EPR is a quantitative measure of the scattering of an electromagnetic wave. The higher the EPR value, the further away the object can be detected. The EPR is determined by the physical and geometric properties of the object.



The problems solved by Ufimtsev allowed us to formulate the concept of inconspicuous objects. Using such an ideology in the construction of aircraft and knowing the characteristics of enemy radars, it was possible to significantly reduce the detection range. This technology, which will later become evident in Yugoslavia (this will be discussed in Part 2), can provide a huge advantage. Let me remind you that the time of writing the monograph was 1962, the time of the Cuban Missile Crisis and the Cold War. The world was on the brink of war and destruction. The arms race continued and the use of stealth technology could make it possible to take the lead in this race.



However, the Soviet Union did not take the idea seriously. And there are many reasons for this. At that time, the Soviet Union focused on the speed and maneuverability of aircraft (MiG-15, MiG-17). The new concept implied a complete abandonment of these parameters. To build an airplane using stealth technology, it was necessary to reinvent the airplane, just as Steve Jobs later reinvented the telephone. Unfortunately, the USSR is not a country in which any discussion on this matter was possible. The exact reason why the Soviet Union abandoned the development of a low-observability aircraft is unknown. The monograph sold a large circulation of 6,500 copies and it is doubtful that none of the management thought about using this theory. 

 Development in the USA

 Let's move to the USA. At that time, American aircraft could not boast of their power. The first development of a stealth aircraft in the United States began in 1958. However, the attempts were unsuccessful. The planes were much inferior to the Soviet ones, as demonstrated by the Vietnam War. Their basic science lagged behind. They had not heard about the edge wave method until they accidentally (or maybe not) translated Ufimtsev’s monograph in 1971. Having got their hands on the theory, the missing link, they began development. The project received funding of several billion dollars. Lockheed and Northrop, using Ufimtsev’s theory and computer modeling (this was already possible in the USA in 1975), were able to develop in 1983 the first aircraft completely made using Stealth technology (Stealth - cunning) - the F-117 Night Hawk. one of the F-117 developers stated

“Ufimtsev’s contribution to the construction of this aircraft is about 30-40%, that is, a controlling stake.”

Many journalists began to write about the "invisible plane." But this is absolutely incorrect. Firstly, it is visible in the optical range, and secondly, it is inconspicuous in a certain sector of angles for certain radars.

 I will share my calculation, carried out while still at the institute. If you look at the scattering diagram of the F-117, you can see how much lower its frontal RCS is. Thanks to this shape, the aircraft re-radiates most of the energy of electromagnetic waves into the upper hemisphere. In the direction of the radar, the radiation is extremely small. The ESR of the F-117 aircraft when irradiated from frontal and tail angles is reduced to 0.1-0.01 m2, which is approximately 100-200 times less than that of a conventional aircraft of similar sizes.

Pyotr Yakovlevich Ufimtsev, who at that time was working at a research institute in Moscow, did not know anything about the fact that an airplane had been developed in the USA based on his monograph. Imagine his surprise when, in 1990, he went to a conference in the USA by invitation, after finishing his report, the audience gave him a standing ovation, but he could not understand how he had gained such fame. In the USSR he was known to few people. But his monograph became a reference book for Lokcheed Martin engineers. After so many years, he got what he deserved. True, not in my home country. In the 90s, no one in Russia needed scientific personnel, the economic crisis and meager salaries. Ufimtsev goes to work at the University of California at Los Angeles as a visiting professor and participates in the creation of the B2 strategic bomber. Now Ufimtsev is 88 years old and lives in America.




P.Ya. Ufimtsev published a monograph “The method of edge waves in the physical theory of diffraction.” «Метод краевых волн в физической теории дифракции».


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domingo, 24 de dezembro de 2023

Design and characterization of a three-phase current source inverter using 1.7kV SiC power devices for photovoltaic applications Luis Gabriel Alves Rodrigues THÈSE Pour obtenir le grade de DOCTEUR DE LA COMMUNAUTE UNIVERSITE GRENOBLE ALPES Spécialité : Génie Electrique


 








Design and characterization of a three-phase current source inverter using 1.7kV SiC power devices for photovoltaic applications 

Luis Gabriel Alves Rodrigues 

 THÈSE Pour obtenir le grade de DOCTEUR DE LA COMMUNAUTE UNIVERSITE GRENOBLE ALPES Spécialité : Génie Electrique 

 Abstract

 Classically, the energy conversion architecture found in photovoltaic (PV) power plants includes solar arrays delivering a maximum voltage of 1kV followed by a step-up chopper connected to a three-phase Voltage Source Inverter. This multistage conversion system (DC/DC + DC/AC) is then connected to the medium-voltage grid through a low-voltage/medium-voltage transformer. In order to simplify the PV systems, this research work focuses on the study and implementation of a DC/AC topology employing a single power processing stage: the three-phase Current Source Inverter (CSI). To deal with the inconvenient of high conduction losses when implementing this topology, wide-bandgap Silicon Carbide (SiC) semiconductors are used, allowing to efficiently convert energy while keeping a relatively high switching frequency. Nonetheless, since the available power semiconductor modules on the market are not compatible with the CSI, a novel 1.7kV SiC-based voltage bidirectional module is developed in the context of this thesis. Hence, the dynamic characterization of the new SiC device is carried out and serves as the basis for the design of a 60kW CSI prototype. Finally, the inverter efficiency is evaluated at nominal operating conditions, employing both a calorimetric and electrical methods. The obtained results confirm the CSI ability to operate efficiently at high switching frequencies (η>98.5% @60kHz). The originality of this work lies mainly in the design, characterization and implementation of the new 1.7kV full-SiC power module adapted to the CSI topology.

 Keywords: Power electronics, DC/AC converters, Current Source Inverter (CSI), Silicon Carbide (SiC), Photovoltaics, Power module.



terça-feira, 19 de dezembro de 2023

6배압 정류기를 이용한 고전압 전원장치에 관한 연구 (A Study of the High Voltage Power Supply using a Sixfold Voltage-Multiplying Rectifier) 안태영*․길용만** (Tae-Young Ahn․Yongl-Man Gil)----Journal of the Korean Institute of IIIuminating and Electrical Installation Engineers (2015) 29(2):19~26




6배압 정류기를 이용한 고전압 전원장치에 관한 연구 (A Study of the High Voltage Power Supply using a Sixfold Voltage-Multiplying Rectifier) 안태영*․길용만** (Tae-Young Ahn․Yongl-Man Gil)

 Abstract 

This paper presents design, fabrication, and performance evaluation of a high voltage power supply for Carbon Nano Tube-based planar light sources. The proposed power supply employs an LLC resonant half-bridge converter and a sixfold voltage-multiplying rectifier. Steady-state characteristics of the voltage-multiplying rectifier are analyzed and used to derive the input-to-output voltage conversion ratio of the power supply. The input-to-output frequency response characteristics of the LLC tank circuit are analyzed and utilized in designing a proto-type power supply which produces a 15 KV output using a 400 V input source. The high-voltage transformer is fabricated using a sectional bobbin structure with an epoxy impregnation, in order to provide sufficient insulation for high voltage operations. The performance of the proposed power supply is confirmed with stable and reliable operations at the 15 KV output from no load to nominal load conditions. The proposed power supply is well suited as an electric ballast required stable operations of Carbon Nano Tube-based planar light sources.

sexta-feira, 8 de dezembro de 2023

Modeling and Design of Medium-Frequency Transformers for Future Medium-Voltage Power Electronics Interfaces A thesis submitted to attain the degree of DOCTOR OF SCIENCES of ETH ZURICH (Dr. sc. ETH Zurich) presented by THOMAS PAUL HENRI GUILLOD



 Modeling and Design of Medium-Frequency Transformers for Future Medium-Voltage Power Electronics Interfaces A thesis submitted to attain the degree of DOCTOR OF SCIENCES of ETH ZURICH (Dr. sc. ETH Zurich) presented by THOMAS PAUL HENRI GUILLOD MSc ETH born on 09.09.1989 citizen of Bas-Vully, Switzerland accepted on the recommendation of Prof. Dr. Johann W. Kolar, examiner Prof. Dr. Dražen Dujić, co-examiner 2018



Abstract 

Newly available fast-switching Medium-Voltage (MV) Silicon-Carbide (SiC) semiconductors are setting new limits for the design space of MV converters. Unprecedented blocking voltages (up to 15 kV), higher switching frequencies (up to 200 kHz), higher commutation speeds (up to 100 kVμs), and high temperature operation can be reached. These semiconductors feature reduced switching and conduction losses and, therefore, allow for the realization of extremely efficient and compact MV converters. Moreover, the increased blocking voltage allows the usage of simple single-cell topologies for MV converters instead of complex multi-cell systems. Hence, the MV SiC semiconductors are interesting for many applications such as locomotive traction chains, datacenter power supply chains, collecting grids for renewable energies, high power electric vehicle chargers, and more-electric aircraft. Most of these applications require an isolated DC-DC converter for providing voltage scaling and galvanic isolation. However, the increased voltages and frequencies allowed by MV SiC semiconductors create new challenges for the design of Medium-Frequency (MF) transformers, which start to become the bottleneck of isolated DC-DC converters in terms of power density and efficiency. More specifically, the winding losses (due to skin and proximity effects) and the core losses (due to eddy currents and hysteresis) are rapidly increasing and mitigate the advantages (e.g., the reduced volt-second product applied to the magnetic core) obtained with the increased operating frequencies. Moreover, the MV/MF PWM voltages with fast switching transitions are also particularly critical for the insulation of MF transformers and can lead to additional losses, thermal breakdowns, and partial discharge induced breakdowns. Finally, the MF transformers of DC-DC converters should feature reduced losses (efficiencies above 99:5 %) in order to match the performance offered by the MV SiC semiconductors. The main focus of this thesis is, thus, set on the design of highly efficient MV/MF transformers employed in isolated DC-DC converters. First, a theoretical analysis of MF transformers is conducted in order to extract the fundamental performance limitations of such devices. The nature of the optimal designs is examined with analytical models, scaling laws, and numerical optimizations. Afterwards, several points are identified as critical and are studied in more detail. First, the impact of model uncertainties and parameter tolerances on MF transformers is examined with statistical methods in order to highlight the achievable modeling accuracy. Then, a 2.5D numerical field simulation method is presented for assessing the impact of non-idealities on the losses produced vii Abstract by litz wire windings (e.g., twisting scheme and pitch length). Afterwards, the impact of MV/MF PWM voltages with fast switching transitions on the insulation is examined. The electric field pattern is analyzed inside, at the surface, and outside the insulation and shielding methods are proposed. Finally, the dielectric loss mechanisms of dry-type insulation materials under PWM voltages is examined in detail. Different analytical expressions are proposed for extracting the insulation losses and it is found that the dielectric losses can be significant for MV/MF transformers operated with MV SiC semiconductors. Design guidelines are proposed for the selection of appropriate insulation materials for MV/MF applications and silicone elastomer is identified as an interesting choice. All the presented results are verified with measurements conducted on different MF transformer prototypes. The derived models and results are applied to a MV isolated DC-DC converter, which is part of a MV AC (3:8 kV, phase-to-neutral RMS voltage) to LV DC (400 V) Solid-State Transformer (SST) demonstrator. This SST is aimed to supply future datacenters directly from the MV grid. The considered 25 kW DC-DC converter operates between a 7 kV DC bus and a 400 V DC bus. The usage of 10 kV SiC MOSFETs allows for the realization of the converter with a single-cell DC-DC Series-Resonant Converter (SRC). The DC-DC SRC is operated at 48 kHz as a DC Transformer (DCX) and the modulation scheme, which allows for Zero-Voltage Switching (ZVS) of all semiconductors, is examined in detail. The realized MV/MF transformer prototype features a power density of 7:4 kWl (121 kWin3, 4:0 kWkg, and 1:8 kWlb) and achieves a full-load efficiency of 99:65 %. The complete DC-DC converter achieves an efficiency of 99:0 % between 50 % and 100 % load with a power density of 3:8 kWl (62Win3, 2:9 kWkg, and 1:3 kWlb). The results obtained with the constructed DC-DC converter, which are significantly beyond the stateof- the-art, demonstrate that MV/MF transformers can utilize the possibilities offered by the new MV SiC semiconductors. .
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quinta-feira, 7 de dezembro de 2023

Thèse de doctorat en Génie électrique Option: Automatique Présentée par: SAFA AHMED-Etude de la contribution de l’électronique de puissance dans les microréseaux-Ecole Nationale Polytechnique Département Automatique Laboratoire de Commande des Processus


Ecole Nationale Polytechnique Département Automatique Laboratoire de Commande des Processus
Thèse de doctorat en Génie électrique
Option: Automatique
Présentée par:
SAFA AHMED
Magistère en Génie électrique Université de Tiaret.
Composition du Jury :
Président: TADJINE Mohamed Pr ENP
Examinateurs: MAHMOUDI Mohand Oulhadj Pr ENP
BOUCHAFAA Farid Pr USTHB
ALLAOUI Tayeb Pr U. Tiaret
GHEDAMSI Kaci Pr U. Bejaia
Rapporteurs: MESSLEM Youcef Pr U. Tiaret
BERKOUK El Madjid Pr ENP
ENP 2018
Etude de la contribution de l’électronique
de puissance dans les microréseaux

RESUMO 

A configuração clássica das modernas redes elétricas de alta potência oferece um grande número de vantagens em relação às antigas do ponto de vista da flexibilidade. Além disso, grandes unidades de produção tornam-se mais eficientes e operam apenas com um número relativamente pequeno de pessoal. A rede interligada de transmissão de alta tensão permite minimizar a necessidade de reservas de geração, enviá-la a qualquer momento para a instalação de geração de energia mais eficiente e transportá-la a granel por grandes distâncias com perdas elétricas limitadas. A rede de distribuição pode ser projetada para fluxos de energia unidirecionais e dimensionada para suportar apenas cargas do cliente ou bidirecional. No início da década de 2000, a utilização de energias renováveis, especialmente as baseadas na energia solar e eólica, registou um verdadeiro crescimento. Impulsionados pelos objectivos climáticos e pelos benefícios económicos, vários países em todo o mundo aumentaram as suas ambições. Dada a natureza centralizada das redes eléctricas, a integração de fontes de energia distribuídas (Distributed Energy Sources DES) representa um desafio para os operadores de rede. As autoridades de vários países iniciaram a desregulamentação do mercado energético o que resultou na produção descentralizada, é o caso da rede da Califórnia nos EUA, e na Argélia os textos regulatórios foram desenvolvidos, mas a implementação permanece. Diante dessa nova tendência energética, surgiu um novo conceito: a microrrede (Microgrid MG). Um MG é uma agregação de fontes e cargas que aparece para a rede central como uma carga dinâmica. Portanto, uma microrrede é uma rede dentro de uma rede. As motivações que incentivam a MG são: 

 Redução de emissões gasosas (principalmente CO2). 
 Eficiência energética ou uso racional de energia.
  Desregulamentação ou política de concorrência.
 Diversificação das fontes de energia.
 Requisitos de energia nacionais e globais. Outras razões, mas com ênfase adicional em considerações comerciais, tais como:
  Disponibilidade de centrais eléctricas modulares. 
 Facilidade de encontrar locais para pequenos geradores.
  Tempos de construção curtos e custos de investimento reduzidos para pequenas fábricas.
  A geração pode estar localizada mais próxima da carga, o que pode reduzir os custos de transmissão. Para preservar a estabilidade e a qualidade do serviço, as autoridades reguladoras estabeleceram padrões (especificações) para a microrrede para que possam ser conectadas à rede. Estas normas exigem, entre outras coisas, um determinado mínimo para os índices de qualidade da eletricidade (taxa THD, taxa de desequilíbrio, etc.). O objetivo deste trabalho de tese é desenvolver algoritmos de controle para melhorar a qualidade da eletricidade de uma microrrede para que ela cumpra os diferentes códigos regulatórios. E desenvolver um algoritmo que permita a sincronização do inversor que é o órgão central da rede. Esta tese está dividida em cinco capítulos. No primeiro capítulo é apresentado o princípio da geração distribuída, suas vantagens trazidas para a rede de distribuição e suas desvantagens. O conceito de microrrede (Microgrid MG) é então apresentado como a solução para integração ideal e mais controlada de fontes de geração distribuída. Para se conectar à rede, o MG deve estar alinhado ao padrão de conexão, portanto são citados problemas de qualidade de energia. Para melhorar a qualidade da eletricidade de um MG, um conversor estático, muitas vezes um inversor multifuncional (MultiFunctionql Grid Tied Inverter MFGTI), é conectado ao PCC. O estado da arte das técnicas de sincronização de conversores à rede seguido do estado da arte do controle MFGTI concluirá este primeiro capítulo. O segundo capítulo foca no desenvolvimento de uma técnica de sincronização para conversores conectados em rede. Nosso objetivo é desenvolver um algoritmo que seja insensível à qualidade da tensão da rede e leve para implementação em processadores de baixo custo. O terceiro capítulo apresenta a análise e desenvolvimento de um controle MFGTI baseado nos princípios das potências instantâneas. O Estimador de Componente Fundamental Positiva PFCE desenvolvido no Capítulo 2 será usado para extrair diretamente a fundamental da corrente de carga sem mudança de fase ou erro. Um controle de modo deslizante é desenvolvido para controlar a tensão do barramento CC. Consequentemente, o método desenvolvido neste capítulo é denominado PFCE-SMC. O quarto capítulo é dedicado ao desenvolvimento de um controle baseado no método de controle direto do MFGTI. Um controle de modo deslizante é usado para estimar a amplitude da corrente da fonte a partir da configuração da tensão do barramento CC. Para melhorar o controle, uma ação integral é adicionada com um filtro passa-baixa, daí o nome SMC-LPF. ​

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THÈSE Pour obtenir le grade de DOCTEUR DE L’UNIVERSITÉ JEAN MONNET DE SAINT-ÉTIENNE-Par Khamis YOUSSOUF KHAMIS Modélisation des Transformateurs Planaires Intégrés


 

THÈSE Pour obtenir le grade de DOCTEUR DE L’UNIVERSITÉ JEAN MONNET DE SAINT-ÉTIENNE Ecole Doctorale Sciences, Ingénierie, Santé : ED SIS 488 Discipline : Optique Photonique Hyperfréquence Présentée et soutenue publiquement le 26 Mars 2014

 Par Khamis YOUSSOUF KHAMIS

 Modélisation des Transformateurs Planaires Intégrés Directeur de thèse : Jean Jacques ROUSSEAU

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segunda-feira, 4 de dezembro de 2023

Problemy współczesnej inżynierii Wybrane zagadnienia elektroniki, informatyki i inżynierii biomedycznej-Problems of modern engineering Selected issues of electronics and computer science and biomedical engineering-Politechnika Lubelska Wydział Elektrotechniki i Informatyki


 Problemy współczesnej inżynierii Wybrane zagadnienia elektroniki, informatyki i inżynierii biomedycznej-Problems of modern engineering Selected issues of electronics and computer science and biomedical engineering-Politechnika Lubelska Wydział Elektrotechniki i Informatyki

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Mieczysław Dziubiński, Jerzy Ocioszyński, Stanisław Walusiak ELEKTROTECHNIKA I ELEKTRONIKA SAMOCHODOWA -Mieczysław Dziubiński, Jerzy Ocioszyński, Stanisław Walusiak ELECTROTECHNICS AND ELECTRONICS CAR University Publishing House of the Lublin University of Technology Lublin 1998


Mieczysław Dziubiński, Jerzy Ocioszyński, Stanisław Walusiak 
ELEKTROTECHNIKA I ELEKTRONIKA SAMOCHODOWA -Mieczysław Dziubiński, Jerzy Ocioszyński, Stanisław Walusiak ELECTROTECHNICS AND ELECTRONICS CAR University Publishing House of the Lublin University of Technology Lublin 1998

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An Isolated High-Voltage High-Frequency Pulsed Power Converter for Plasma Generation by Changqi You-A thesis submitted in partial fulfillment of the requirements for the degree of Master of Science in Engineering (Electrical Engineering) in the University of Michigan-Dearborn 2018


 An Isolated High-Voltage High-Frequency Pulsed Power Converter for Plasma Generation by Changqi You A thesis submitted in partial fulfillment of the requirements for the degree of Master of Science in Engineering (Electrical Engineering) in the University of Michigan-Dearborn 2018 

 ABSTRACT 
This thesis reviews plasma technology, pulsed power technology, basic structures of pulsed power generator and semiconductor devices. Based on above, an isolated high voltage pulsed power converter with high repetitive frequency for low power level application such as ozone generation is proposed in this thesis. The hardware for proposed pulsed power converter is well set up. The output pulsed voltage can reach -12 kV with pulse frequency up to 15 kHz. The pulse interval is designed as 1.6 µs. The proposed pulsed power converter system could be divided into two main parts, which are boost converter stage and a resonant stage. This thesis detailly introduces the structure and operating principles of the boost converter stage and the resonant stage. As for the boost converter stage, both analog control and digital control are applied to achieve the boost voltage function and power limiting function. As for the resonant stage, a pulse generating signal and spark protection function is achieved with a DSP control. This thesis also detailly gives an analysis for parasitic parameters of the proposed pulsed power converter system. Parasitic capacitances of SiC MOSFETs will affect spike performance of the proposed pulsed power converter system. A mathematical model of describing a relationship between parasitic capacitances of SiC MOSFETs and the spike voltage of the proposed pulsed power converter is proposed in this thesis. A comparison test is conducted to prove the proposed analysis.
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MSc. Grzegorz Komarzyniec ANALYSIS OF THE OPERATION OF A FIVE-COLUMN TRANSFORMER IN THE POWER SYSTEM OF THE ARC PLASMA REACTOR-LUBLIN UNIVERSITY OF TECHNOLOGY Faculty of Electrical Engineering and Computer Science Institute of Fundamentals of Electrical Engineering and Electrotechnology







LUBLIN UNIVERSITY OF TECHNOLOGY Faculty of Electrical Engineering and Computer Science Institute of Fundamentals of Electrical Engineering and Electrotechnology MSc. Grzegorz Komarzyniec ANALYSIS OF THE OPERATION OF A FIVE-COLUMN TRANSFORMER IN THE POWER SYSTEM OF THE ARC PLASMA REACTOR dissertation Promoter: prof. emergency PL, Ph.D. engineer Henryka Danuta Stryczewska Lublin 2008

 1. Introduction

The history of the use of plasma in technology begins around 1800, when Sir Humphry Bartholomew Davy began research on arc discharge in the air. Eight years later, Davy develops the arc lamp, and in 1878, Ernst Werner von Siemens invents and patents an arc furnace for melting steel. In 1901, Guglielmo Marconi used an electric arc to transmit radio across the Atlantic. At the same time, research work on discharges in gases is ongoing. The first ionized gas was examined and described in 1839 by Michael Faraday, and in 1879 Sir William Crookes pointed out that discharges in gases can be treated as the fourth state of matter. Many years later, in 1923, Irving Langmuir introduced the term plasma. Since Langmuir's time, the concept of plasma has changed and now plasma is understood as an ionized gas that is a quasi-neutral mixture of free ions, electrons and neutral particles. The energy of plasma particles can range in a very wide range from 0.2 eV to 2 MeV, which is why it can vary greatly in the degree of ionization and properties. Due to the fact that plasma can occur in a wide range of temperatures and pressures, it is divided into low-pressure and high-pressure plasma, as well as low-temperature (cold) and high-temperature (hot) plasma. Low-temperature plasma is usually considered to be a partially ionized gas located in the temperature range from 2,000 K to 30,000 K. High-temperature plasma is an almost completely ionized gas in which most of the ions are multiply ionized and some may be free nuclei stripped of all electrons. This plasma covers the temperature range from 10 million K to 1,000 million K. High-pressure plasma covering the pressure range above 100 kPa is similar to high-temperature plasma in terms of thermodynamic equilibrium. However, at pressures lower than 100 Pa, a low-pressure plasma occurs, characterized by thermodynamic imbalance. There is no clear boundary between gas and plasma, hence the transition from gas to plasma is considered to be the moment when a small amount of charged particles of matter changes its properties and electrical conductivity appears. Plasma is the normal state of matter at temperatures of 10,000 K and higher. Stars and interstellar gas are made of plasma, which makes it the most common the state of matter found in the Universe. In terrestrial conditions, it occurs in the aurora borealis and lightning. For technical and laboratory purposes, low-temperature plasma is produced, most often by electric discharges in the gas, in devices called plasma reactors. Plasma generated in this way is becoming more and more widely used in many fields of science and industry. New types of plasma reactors are being created, and existing ones are being improved and improved. Currently, plasma is used in metallurgy and foundry, machine construction, microelectronics industry, plasma chemistry, space research, medical laboratories and environmental protection. Protection of the natural environment is a priority area in the development of civilization. Modern technologies offer many solutions that can be or are used in environmental protection, but particular attention has been paid to plasma methods [1], [2], [3], [4]. One of the more promising technologies is the use of low-temperature plasma generated at atmospheric pressure in sliding arc discharge reactors [30], [31]. In these reactors, at the moment of ignition, the discharge takes the form of a short arc, which is in a state of thermodynamic equilibrium. Under the influence of electrodynamic and gas-dynamic forces acting on the arc column occurring in the discharge chamber, the discharge moves along the electrodes. As a result of a several-fold increase in length and volume, the discharge reaches the state of a long arc in a non-equilibrium state. The arc develops as long as the power supply system is able to cover the discharge energy losses to the environment. The duration of one reactor operation cycle is influenced by many factors, including: the dimensions and shape of the electrodes, the flow rate of the gaseous medium through the discharge chamber, the chemical compositionof the gas in which the discharge takes place, the voltage and current of the electrodes, and the frequency of the supply voltage.

The advantages of plasma and the wide range of applications of plasma reactors mean that interest in plasma is increasing, and currently this issue is being studied by research centers in Japan, the United States, France and Russia. In Poland, research in this field has been conducted for several years at the Institute of Fundamentals of Electrical Engineering and Electrotechnology of the Lublin University of Technology and many other research centers in Częstochowa, Gdańsk, Łódź, Poznań, Szczecin, Warsaw and Wrocław. Conducting any process using plasma should be based on knowledge of its properties and mastering the methods of obtaining it, because plasma cannot be stored and transported. Therefore, plasma research around the world focuses on achieving controlled plasmachemical reactions. The repeatability of processes carried out with its participation largely depends on the stability of the parameters of the generated plasma. The plasma parameters necessary for the correct course of the reaction are obtained by controlling the conditions in which the discharge burns, i.e. the chemical composition of the plasma-forming gas, its pressure and humidity, and by controlling the parameters of the material subjected to plasma treatment. A properly selected power system is of great importance for generating plasma with appropriate parameters. Its solutions must meet the requirements of plasma reactors [65], [66], which are special electrical energy receivers with non-linear characteristics and rapid changes in the instantaneous values of currents, voltages and conductance of the discharge space.


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Effects of transformer inrush current-A dissertation submitted by Kunal J Patel in fulfilment of the requirements of Courses ENG4111 and ENG4112 Research Project Towards the degree of Bachelor of Engineering (Power System)


 

University of Southern Queensland Faculty of Health, Engineering & Sciences Effects of transformer inrush current A dissertation submitted by Kunal J Patel in fulfilment of the requirements of Courses ENG4111 and ENG4112 Research Project Towards the degree of Bachelor of Engineering (Power System) 

 Abstract 
Inrush current in transformer is often gets less importance compared to other effects/faults. Though the magnitude of inrush current may be in some cases less than compared to short circuit current, the frequency and duration of inrush current is generally more frequent, hence it will likely have more adverse effect compared to other faults. Inrush current may flow when transformer is energised. The amount of inrush current depends on when in the voltage cycle the transformer is energised and residual flux in the transformer. The other type of inrush current is sympathetic inrush current which flows in already energised transformer when another transformer is energised in parallel connected line. This report contains basic principle, fundamental theory and relevant laws of the transformer and inrush current. A number of factors affecting inrush current are discussed. The inrush current theory and their equation are derived. The effects of inrush current are described in brief. As a part of this project a number of effects and factor affecting inrush current are considered for simulation. The Matlab Sim-Power system is used for the simulation. The simulation results compared with each other and also data available from actual same size transformer. Finally six solutions to inrush current mitigation techniques with a practical low cost answer are provided.

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segunda-feira, 27 de novembro de 2023

Stability problems of PV inverter in weak grid: a review-Qianjin Zhang, Mingxuan Mao, Guo Ke, Lin Zhou, Bao Xie-State Key Laboratory of Power Transmission Equipment & System Security and New Technology, Chongqing University, Chongqing 400044,People's Republic of China-IET POWER ELECTRONICS


 

Stability problems of PV inverter in weak grid:a review Qianjin Zhang1, Mingxuan Mao1,2, Guo Ke1, Lin Zhou1, Bao Xie11State Key 
Laboratory of Power Transmission Equipment & System Security and New Technology, Chongqing University, Chongqing 400044,People's Republic of China
2Postdoctoral Station of Electrical Engineering, Chongqing University, Chongqing 400044, People's Republic of China E-mail: mingxuan_mao@cqu.edu.cn

Abstract:

 Photovoltaic (PV) power generation, as one important part of renewable energy, has been greatly developed in recentyears. The stability of PV inverters is very important for the normal operation of PV systems. However, most PV systems,especially the large PV plants, locate in rural areas. The corresponding equivalent grid impedance is rather large and easy tolead to stability problems of grid-connected inverters and many researches have been done focusing on the stability problems.In this study, a survey of stability problems of PV inverters on weak grid condition is given. The stability problems are mainlydivided into two parts, i.e. the control loops instability and inverter output voltage instability. The control loops cover the currentloop and dc voltage loop. The output voltage instability refers to the voltage phasors relationship and the application of reactivepower compensation. The non-linear parts of inverter dead-time, digital control delay, and phase-locked loop are explored.Future trends and challenges are given

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domingo, 26 de novembro de 2023

Modelling and analysis of medium frequency transformers for power converters -Piotr Dworakowski-DOCTORAL DISSERTATION-Electric power.Gdansk University of Technology,2020.





 

Modelling and analysis of medium frequency transformers for power converters -Piotr Dworakowski-DOCTORAL DISSERTATION-Electric power.Gdansk University of Technology,2020. 

 ABSTRACT 
The evolutions in power systems and electric vehicles, related to the economic opportunities and the environmental issues, bring the need for high power galvanically isolated DC-DC converter. The medium frequency transformer (MFT) is one of its key components, enabled by the increasing switching frequency of modern power semiconductors like silicon carbide transistors or diodes. The increased operating frequency offers small converter size, leading to the decrease in raw material usage. Most likely this will result in the converter cost reduction which will further increase the demand for solid state transformer solutions. The modeling and analysis are essential in the development of the MFT technology which is attracting lots of research and industrial interest. In this dissertation the isolated DC-DC converter topologies are introduced with the particular focus on the dual active bridge (DAB). The key components of the isolated DC-DC converters, power semiconductors and medium frequency transformer are reviewed. A mathematical model of a 3-phase MFT in the isolated DC-DC power converter, suitable in electromagnetic transient and steady state simulation is developed. The transformer modeling methods are reviewed and the Lagrange energy method is used to derive a physically motivated model for circuit analysis. The model involves a matrix of nonlinear magnetizing inductances and a matrix of linear leakage inductances, both including self and mutual values. The macroscopic models of magnetic hysteresis are reviewed and the feedback Preisach model is developed. The design of a 3-phase 20 kHz transformer for a 100 kW 1.2 kV isolated DC-DC power converter is presented. The particular focus is put on the winding and core design, and power loss and thermal calculations which are the most critical aspects of the high-power density transformer. The design results in two 3-phase MFT prototypes, first of its kind worldwide. A finite element model of the transformer is developed allowing to determine the magnetic flux characteristic Φ(Θ) and the related inductances required in the circuit model. The finite element model is based on the measured equivalent B(H) and homogenized material properties. Other model parameters are calculated analytically and compared against the measurement on the prototype MFT. The dissertation is concluded showing the technical feasibility and benefits of the 3-phase MFT. The developed MFT prototype operating at 20 kHz is more than 10 times lighter than the equivalent 50 Hz transformer. The 3-phase 100 kW DC-DC converter efficiency is measured 99.2% which is an impressive result. The efficiency of the 3-phase DC-DC is higher than its equivalent single-phase variant. A challenge of high power MFT design related to the parasitic air gaps in the core is highlighted. The influence of the air gaps on core power loss is confirmed showing that the increase in the air gap size in a certain range causes a decrease in the core power loss. In the 3-phase MFT prototype the parasitic air gaps do not cause any measurable effect on winding power loss and temperature. It is shown that the relative magnetic permeability is nonlinearly decreasing with the increase of the number of parasitic air gaps. An exponential interpolation function is proposed allowing to estimate the equivalent magnetic permeability, average air gap length and magnetizing inductance for any high-power ferrite core MFT with a similar core assembly. The proposed MFT equivalent circuit model is proven accurate in steady state and transient analyses. The no-load inrush test confirms the importance of the magnetic cross saturation involved in the magnetizing inductance model. The influence of the mutual leakage inductance on the operation of the DAB converter is shown. The feedback Preisach model of hysteresis is proven accurate in the modeling of hysteresis loops in the multi air gap ferrite core MFT.
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Active Gate Drivers for High-Frequency Application of SiC MOSFETs-BY Alejandro Paredes Camacho-Thesis submitted in partial fulfilment of the requirement for the PhD degree issued by the Universitat Politècnica de Catalunya, in its Electronic Engineering Program.

Active Gate Drivers for High-Frequency Application of SiC MOSFETs-BY Alejandro Paredes Camacho-Thesis submitted in partial fulfilment of the requirement for the PhD degree issued by the Universitat Politècnica de Catalunya, in its Electronic Engineering Program. 

 Abstract 
The trend in the development of power converters is focused on efficient systems with high power density, reliability and low cost. The challenges to cover the new power converters requirements are mainly concentered on the use of new switching-device technologies such as silicon carbide MOSFETs (SiC). SiC MOSFETs have better characteristics than their silicon counterparts; they have low conduction resistance, can work at higher switching speeds and can operate at higher temperature and voltage levels. Despite the advantages of SiC transistors, operating at high switching frequencies, with these devices, reveal new challenges. The fast switching speeds of SiC MOSFETs can cause over-voltages and over-currents that lead to electromagnetic interference (EMI) problems. For this reason, gate drivers (GD) development is a fundamental stage in SiC MOSFETs circuitry design. The reduction of the problems at high switching frequencies, thus increasing their performance, will allow to take advantage of these devices and achieve more efficient and high power density systems. This Thesis consists of a study, design and development of active gate drivers (AGDs) aimed to improve the switching performance of SiC MOSFETs applied to high-frequency power converters. Every developed stage regarding the GDs is validated through tests and experimental studies. In addition, the developed GDs are applied to converters for wireless charging systems of electric vehicle batteries. The results show the effectiveness of the proposed GDs and their viability in power converters based on SiC MOSFET devices.

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quarta-feira, 22 de novembro de 2023

13.56 MHz high power and high efficiency inverter for dynamic EV charging systems A DISSERTATION SUBMITTED TO THE GRADUATE SCHOOL OF ENGINEERING AND SCIENCE OF SHIBAURA INSTITUTE OF TECHNOLOGY by NGUYEN KIEN TRUNG IN PARTIAL FULFILLMENT OF THE REQUIREMENTS FOR THE DEGREE OF DOCTOR OF PHILOSOPHY SEPTEMBER 2016


 
13.56 MHz high power and high efficiency inverter for dynamic EV charging systems
A DISSERTATION SUBMITTED TO THE GRADUATE SCHOOL OF ENGINEERING AND SCIENCE OF SHIBAURA INSTITUTE OF TECHNOLOGY by NGUYEN KIEN TRUNG IN PARTIAL FULFILLMENT OF THE REQUIREMENTS FOR THE DEGREE OF DOCTOR OF PHILOSOPHY SEPTEMBER 2016

 Abstract 
Recently, Electric Vehicles (EVs) are a promising solution for reduc- ing CO2 emission and air pollution in the big cities. However, until now, the EVs have been not so attractive to consumers due to the short running distance, long charging time and high battery cost. The dynamic charging solution has been proposed to reduce the energy de- pendence and battery cost of EVs. As the demand of that systems, a 13.56 MHz high power inverter with the eciency of over 95% is re- quired. With the previous researches, there are three major research challenges have been recorded. At very high switching frequency such as 13.56 MHz, the in uence of the parasitic elements in the circuit is the rst challenge because it strongly a ect both of power and drive circuit of the inverter. Consequently, the inverter may be damaged or unstable. Secondly, the switching and gate drive power loss in the inverter are also the challenge when it proportionally increase with the switching frequency. At 13.56 MHz, it is dicult to obtain the extremely high eciency such as 95%. Finally, the high output power required is another challenge due to the low rate-parameters and the challenges in the parallel connecting of the high speed switching de- vices. To overcome these challenges, a number of the analyses and proposed design are presented in this dissertation. Firstly, the e ect of the parasitic elements in the high switch- ing frequency half-bridge inverter is analyzed and evaluated in detail based on the perspective of the ringing loop in the circuit. Based on these, an optimized PCB design is proposed to minimize the parasitic inductance in the ringing loop of the inverter. With the improved PCB, the experiment results show that, the peak voltage and the am- plitude of the ringing current in the circuit is reduced. However, the ZVS condition and the stability of the inverter at high input voltage condition are not achieved due to the high frequency ringing in the circuit. Therefore, a ringing damping circuit is proposed. The high stability and the low power loss on the proposed damping circuit is the advantage to obtain high eciency of the inverter. In the ex- periment results, the ringing current in the circuit is damped. A 1.2 kW output power is obtained with the eciency of 93.1%. This is an improvement in the 13.56 MHz inverter. However, it does not meet the required eciency of the inverter for the dynamic EV charging systems due to limited switching speed of the silicon-MOSFET. Secondly, to improve the eciency of the inverter, the GaN HEMT device is used. In an experiment, the inverter using GaN HEMT obtains the eciency of 97.5% which shows the potential to meet the required eciency of the inverter for the dynamic EV charging systems. However, the output power of the inverter is limited due to the low rate current of the GaN HEMT. And the parallel connection of GaN HEMT devices at 13.56 MHz is very dicult because of the strong unbalance dynamic current distribution. Therefore, a design using multiphase resonant inverter is proposed. The proposed module design, the proposed power loss analysis method to obtain highest eciency and the proposed drive circuit design have been addressed in detail. In experiment, a 3 kW inverter with the eciency of 96.1% is achieved that signi cantly improves the eciency of 13.56 MHz inverter. A 10 kW inverter with the eciency of over 95% will be developed by following this proposed design in near future. Finally, the 13.56 MHz high power inverter with the eciency of over 95% can be realizable. However, the Class DE operation mode which is used in multiphase resonant inverter requires exact parameter of load, resonant circuit and several turning in the experiment process. Therefore, it is still dicult to apply in the dynamic charging systems where the parameters of the coupling system will always change in the operation. The inverter behavior analysis and the further researches to keep the soft switching condition in the operation with the dynamic coupling system are necessary in the future work.
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ISLANDING DETECTION AND POWER QUALITY ANALYSIS IN MICROGRID a Dissertation Submitted to the GRADUATE SCHOOL OF ENGINEERING AND SCIENCE OF SHIBAURA INSTITUTE OF TECHNOLOGY by TRAN THANH SON


 ISLANDING DETECTION AND POWER QUALITY ANALYSIS IN MICROGRID 

a Dissertation Submitted to the GRADUATE SCHOOL OF ENGINEERING AND SCIENCE OF SHIBAURA INSTITUTE OF TECHNOLOGY 
by TRAN THANH SON 
IN PARTIAL FULFILLMENT OF THE REQUIREMENTS FOR THE DEGREE OF DOCTOR OF PHILOSOPHY SEPTEMBER 2019

Abstract
The microgrid (MG) has been developed based on the important con- cept of distributed generation (DG) with high penetration of renew- able energy integrated with energy storage systems (ESSs). MGs can operate in both grid-connected and islanding mode. Therefore, this thesis focuses on autonomous multi-islanded entities and the seamless reconnection to the main grid as the self-healing ability of the fu- ture power system. The minimization of power quality issues (mainly that of voltage, frequency, and harmonics) in such entities based on controllers, with or without intercommunication, is also an important part of this thesis. The future power system, with the signi cant pen- etration of distributed generations (DGs), can rapidly respond to any problem occurring within it by separating into autonomous islanded entities to prevent the disconnection of DGs. As a result, high-quality and continuous power is supplied to consumers. The future research that is necessary for the realization of the future power system is discussed.

Besides, the emergence of Distributed Generation (DG) in the elec- tric system has brought about the appearance of the islanding phe- nomenon. In AC networks, there are a lot of Islanding Detection Methods (IDMs) have been studied. However, not too much IDMs in DC networks have been published because of the absence of frequency and reactive power. The active IDM based on injected perturbation signal and rate of change of power output is proposed. This IDM can detect islanding condition not only in the worst case (the power of the load and PV are equal) but also in another case (the power of load is greater than the power of PV). It can be applied to both single

and multi-PV operation scenarios. Also, the cancellation problem is analyzed and the solution is proposed to solve this problem. Besides, the e ectiveness of the proposed method, the cancellation problem, and the solution are verified by simulation in Matlab/Simulink.

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Development of High-Step-Up IsolatedDCDC Converter based on Super-High Frequency Switching to Physical Limit in Circuit Devices-Department of Electrical Engineering, Kobe City College of Technology Masataka Minami


Development of High-Step-Up IsolatedDCDC Converter based on Super-High Frequency Switching to Physical Limit in Circuit Devices-Department of Electrical Engineering, Kobe City College of Technology Masataka Minami

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Shibaura Institute of Technology doctoral degree thesis High frequency inverter for plasma generation equipment, and research on high frequency matching devices.-芝 浦 工 業 大 学 博 士 学 位 論 文 プラズマ生成装置の高周波インバータ、 および高周波整合器に関する研究 平成 29 年3 月


 


Shibaura Institute of Technology doctoral degree thesis High frequency inverter for plasma generation equipment, and research on high frequency matching devices. March 2017 
 芝 浦 工 業 大 学 博 士 学 位 論 文 プラズマ生成装置の高周波インバータ、 および高周波整合器に関する研究 平成 29 年3 月
Overview 
This paper is concerned with high-frequency plasma generation equipment for functional devices, semiconductor and liquid crystal manufacturing equipment, and aims to reduce power loss in high-frequency inverters, improve power conversion efficiency, and wide-range impedance matching of high-frequency matching boxes using high-frequency transformers. This is a summary of research results regarding. Thin film formation using high-frequency plasma, such as plasma chemical vapor deposition (Plasma CVD), is widely used in the production of semiconductors, liquid crystals, and solar cells. In recent years, the range of applications has expanded to include thin film coatings for industrial purposes. Furthermore, as a pretreatment for a physical vapor deposition (PVD) process, high-frequency plasma treatment using high-frequency waves is widely used to remove a natural oxide film (pre-clean). Conventionally, the mainstream of photoresist stripping treatments has been treatments that do not involve physical reactions, such as liquid etching treatment (wet etching) using acidic or alkaline solutions. In recent years, dry etching, which uses high-frequency plasma to etch materials with reactive gases, etching gases, ions, and radicals, has become mainstream in semiconductors, liquid crystals, and manufacturing equipment. High-frequency plasma technology is becoming increasingly important in the research and development of functional devices. Conventionally, high-frequency inverters with a frequency of 13.56 MHz and a high-frequency output of 1 kW, which are often used in semiconductor manufacturing equipment, have a low high-frequency power conversion efficiency of about 50%, and about 1 kW of power loss is converted into heat. To dissipate 1 kW of heat, a water-cooled heat exchanger and auxiliary equipment were required, which required 200 liters of cooling water per hour. There were also problems from the environmental standpoint of cooling water and ancillary equipment, energy consumption, and economics. In this study, we focused on high-frequency output transformers with the aim of reducing high-frequency power loss and improving power conversion efficiency. Conventionally, a high-frequency output of 1 kW was obtained using four output transformers, but in this research, we investigated a high-efficiency, high-frequency output transformer, and a circuit configuration that achieves a high-frequency output of 1 kW. By using a single high-frequency inverter with a high-frequency output of 1 kW, it is possible to The high frequency output synthesizer used in the frequency inverter is no longer required. Therefore, we investigated ways to reduce power loss in high-frequency output combiners. To create a single high-frequency output transformer, four MOS-FETs must be connected in parallel. We investigated a push-pull type high-frequency inverter with four MOS-FETs connected in parallel using an axial printed circuit board (PCB). We also investigated power loss and temperature at high frequencies in high-frequency output transformers and high-frequency output combiners, which are important in realizing high-efficiency, high-frequency inverters. Furthermore, we evaluated and investigated the power loss and temperature at high frequencies of the high frequency ferrite core that constitutes the high frequency output transformer. Conventionally, in an ICP dry etching system using an L-type high-frequency matching box used in inductively coupled plasma (ICP), the chamber pressure used for high-frequency plasma generation is a low pressure of about 0.1 to 13 Pa, and a pressure of 1011 cm-3 or more is used for generating high-frequency plasma. High density plasma can be obtained. ICP high-frequency plasma is currently the mainstream etching method in semiconductor etching processes because high-density plasma can be obtained without using an electromagnetic coil. In the production of functional devices, photocurable resin (photoresist) is used.
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